Martin HOFFMANN
Professor, Technical University Ilmenau, GERMANY
Director of Micro- and Nano Technologies Institute, Ilmenau, GERMANY
Research interests:
micro-actuators, system integration concepts for MEMS
Keynote address:
Nano goes Macro: Chances in Micro-Nano-Integration
Abstract:
The integration of nanostructures opens up new chances for high performance systems in many fields of application, but usually their integration in microsystems is essential to get benefit from nanoeffects. Due to this, it is important to find ways of integrating nano into micro for macro systems ! Based on two integration techniques this will be presented: Silicon grass fabricated by (deep) reactive ion etching will allow for the fabrication of very large surfaces on silicon that are useful for assembly, microfluidics and infrared optics. In a second part, the use of nanocrystalline aluminium nitride will be discussed as a mechanical and piezoelectrical material with surprising properties.
Martin HOFFMANN, born in 1966, received his Dipl.-Ing. and Dr.-degree (with honors) from Dortmund University (Germany) in 1992 and 1996 respectively, where he developed resonators, integrated optical waveguides and optical waveguide switches for optical communication networks. In the following years, he worked as "Oberingenieur" at the Chair of RF Techniques at the University of Dortmund where he established an optical MEMS group and was responsible for the planning and installation of the new clean room facility. He organized national and international workshops with respect to integrated optics and optical MEMS. In 2003, he finished his Habilitation on Optical Microsystems. He joined HL Planartechnik GmbH, Dortmund, a MEMS company for medical and automotive sensors, where he was responsible for the "Innovative products group". In 2004, he joined Silicon Manufacturing Itzehoe GmbH, Itzehoe, a Philips spin-off, as Project- and Process Manager. His focuses were customized MEMS sensors and new packaging technologies. In January 2006, he became Professor of Micromechanical Systems at the Technische Universitat Ilmenau. Since 2007 he is Director of Institut fur Mikro- und Nanotechnologien, IMN MacroNano®, TU Ilmenau, Germany.
